Planar linear motors Sawyer motors have been used in industry as open-loop stepping motors, but their robustness and versatility has been limited. Using a sensor recently integrated into such a motor, a closed-loop 3-DOF controller has been implemented. The software-based control system consists of a commutator for computing ampli er currents from actuator forces, a force resolution function for solving the redundant actuation and saturation problems, and an observer for producing a velocity estimate, together with a PID controller. Experiments are performed using a 2-axis laser interferometer to show that the controller has sub-micron resolution, 2 m peak-to-peak repeatability, and settling times after trajectories of about 20 ms. Limitations of the PID controller are discussed and ideas for improvements are presented.
Arthur E. Quaid, Ralph L. Hollis