Application of Set Membership Identification for Fault Detection of MEMS

- In this article, a set membership (SM) identification technique is tailored to detect faults in microelectromechanical systems. The SM-identifier estimates an orthotope which contains the system’s parameter vector. Based on this orthotope, the system’s output interval is predicted. If the actual output is outside of this interval, then a fault is detected. Utilization of this scheme can discriminate mechanicalcomponent faults from electronic component variations frequently encountered in MEMS. For testing the suggested algorithm’s performance in simulation studies, an interface between classical control-software (MATLAB) and circuit emulation (HSPICE) is developed.

• Type: Conference
• Year: 2006
• Where: ICRA
• Authors: Vasso Reppa, Anthony Tzes
• Keywords: Electronic Component Variations, ICRA 2006, Robotics, System’s Output Interval, System’s Parameter Vector