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    DDECS
    2009
    IEEE
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    Contactless characterization of MEMS devices using optical microscopy

    14 years 4 months ago
    Contactless characterization of MEMS devices using optical microscopy
    Download  mycite.omikk.bme.hu
    András Timár, György Bogn&aacut
    claim paper
    Added 16 Aug 2010
    Updated 16 Aug 2010
    Type Conference
    Year 2009
    Where DDECS
    Authors András Timár, György Bognár
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