Design and Experiment of a 3DOF Parallel Micro-Mechanism Utilizing Flexure Hinges

Flexure hinge has been commonly used as a substitute for mechanical joints in the design of micropositioning mechanisms. However, inaccurate modeling of flexure hinges deteriorates the positioning accuracy. In this paper, a planar 3DOF parallel-type micro-positioning mechanism is designed with the intention of accurate flexure hinge modeling. For this, a preliminary kinematic analysis that includes inverse kinematics, internal kinematics, and analytic stiffness modeling referenced to the task coordinate is presented. First, the revolute type of 1DOF flexure hinge is considered. The simulation result based on FEM, however, is not coincident to the analytic result. This is due to the minor axial elongation along the link direction that keeps the mechanism from precise positioning. To cope with this problem, a 2DOF flexure hinge model that includes this additional motion degree as a prismatic joint is employed in part. On the basis of this model, the positional accuracy is ensured. The ef...

• Type: Conference
• Year: 2002
• Where: ICRA
• Authors: Byung-Ju Yi, Heung-Youl Na, Goo Bong Chung, Whee Kuk Kim, Il Hong Suh
• Keywords: Flexure Hinge, Flexure Hinge Modeling, ICRA 2002, Positional Accuracy, Robotics