Hybrid Nanorobotic Approaches to NEMS

Robotic manipulation at the nanometer scale is a promising technology for structuring, characterizing and assembling nano building blocks into nanoelectromechanical systems (NEMS). Combined with recently developed nanofabrication processes, a hybrid approach to building NEMS from individual carbon nanotubes (CNTs) and SiGe/Si nanocoils is described. Nanosensors and nanoactuators are investigated from experimental, theoretical, and design perspectives. Key words: nanorobotics, nanoassembly, nanomanipulation, NEMS, carbon nanotubes, nanocoils

• Type: Conference
• Year: 2005
• Where: ISRR
• Authors: Bradley J. Nelson, Lixin Dong, Arunkumar Subramanian, Dominik J. Bell
• Keywords: Carbon Nanotubes, Individual Carbon Nanotubes, ISRR 2005, Nano Building Blocks, Robotics