LIGA Cavity Resonator for K-Band Applications

A 2-mm deep microwave cavity resonator is proposed for LIGA micro-fabrication. LIGA provides highly vertical and optically smooth sidewalls, leading to potentially high quality (Q) factor. Simulation using 3-D finite element method (FEM) shows an unloaded Q (Qu) very close to the theoretical calculation. Feasibility of obtaining such cavities with hard X-ray lithography (XRL) is demonstrated.

• Type: Conference
• Year: 2005
• Where: ICMENS
• Authors: Zhen Ma, David M. Klymyshyn, Sven Achenbach
• Keywords: 3-D Finite Element, Hardware, ICMENS 2005, LIGA Micro-fabrication, Microwave Cavity Resonator