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2006
ACM

Newton: a library-based analytical synthesis tool for RF-MEMS resonators

14 years 3 months ago
Newton: a library-based analytical synthesis tool for RF-MEMS resonators
Newton is a library-based CAD tool with an analytical synthesis engine which has been developed to support the direct synthesis of the physical design and an electromechanically equivalent model of RF-MEMS resonators based on process parameters and performance metrics. Newton provides accuracy comparable to finite element analysis while requiring a fraction of the computation and design time. A comparison of results from synthesis with Newton, design with FEA, and test results from fabricated devices is presented.
Michael S. McCorquodale, James L. McCann, Richard
Added 20 Aug 2010
Updated 20 Aug 2010
Type Conference
Year 2006
Where ASPDAC
Authors Michael S. McCorquodale, James L. McCann, Richard B. Brown
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