A performance analysis system for MEMS using automated imaging methods

The ability to make in-situ performance measurements of MEMS operating at high speeds has been demonstrated using a new image analysis system. Significant improvements in performance and reliability have directly resulted from the use of this system.

• Type: Conference
• Year: 1998
• Where: ITC
• Authors: Glenn F. LaVigne, Sam L. Miller
• Keywords: Hardware, Image Analysis System, In-situ Performance Measurements, ITC 1998, Significant Improvements