Tools and Techniques for Failure Analysis and Qualification of MEMS

Many of the tools and techniques used to evaluate and characterize ICs can be applied to MEMS technology. In this paper we discuss various tools and techniques used to provide structural, chemical, and electrical analysis and how these data aid in qualifying MEMS technologies.

• Type: Conference
• Year: 2003
• Where: ITC
• Authors: Jeremy A. Walraven
• Keywords: Hardware, ITC 2003, MEMS Technologies, MEMS Technology, Various Tools