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    ITC
    2003
    IEEE
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    Tools and Techniques for Failure Analysis and Qualification of MEMS
    14 years 9 months ago
    Tools and Techniques for Failure Analysis and Qualification of MEMS
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    Many of the tools and techniques used to evaluate and characterize ICs can be applied to MEMS technology. In this paper we discuss various tools and techniques used to provide str...
    Jeremy A. Walraven
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