Memory elements are the most vulnerable system component to soft errors. Since memory elements in cache arrays consume a large fraction of the die in modern microprocessors, the probability of particle strikes in these elements is high and can significantly impact overall processor reliability. Previous work [2] has developed effective metrics to accurately measure the vulnerability of cache memory elements. Based on these metrics, we have developed a reliability-performance evaluation framework, which has been built upon the Simplescalar simulator. In this work, we focus on the reliability aspects of L1 and L2 caches. Specifically, we present algorithms for tag vulnerability computation and investigate and report in detail on the vulnerability of data, tag, and status bits in the L2 array. Experiments on SPECint2K and SPECfp2K benchmarks show that one class of error, replacement error, makes up almost 85% of the total tag vulnerability of a 1MB write-back L2 cache. In addition, the...