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    2004
    ACM
    176views Computer Architecture» more  DAC 2004»
    Toward a methodology for manufacturability-driven design rule exploration
    14 years 8 months ago
    Toward a methodology for manufacturability-driven design rule exploration
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    Resolution enhancement techniques (RET) such as optical proximity correction (OPC) and phase-shift mask (PSM) technology are deployed in modern processes to increase the fidelity ...
    Luigi Capodieci, Puneet Gupta, Andrew B. Kahng, De...
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