889 search results - page 2 / 178 » Cluster Tools |
WSC
2008
13 years 10 months ago
2008
Cluster tools, which combine several single-wafer processing modules with wafer handling robots in a closed environment, have been increasingly used for most wafer fabrication pro...
SAC
2004
ACM
14 years 1 months ago
2004
ACM
WSC
2008
13 years 10 months ago
2008
Cluster tools have been one of the proposed alternatives to improve operations performance in semiconductor fabrication. The benefits include high yield throughput, less contamina...
WSC
2007
13 years 10 months ago
2007
Cluster tools are representatives of a special kind of tool where process times of jobs depend on the combination in which they are processed together on the tool and hence, depen...
CLUSTER
2001
IEEE
13 years 11 months ago
2001
IEEE
High-performance computing clusters (commodity hardware with low-latency, high-bandwidth interconnects) based on Linux, are rapidly becoming the dominant computing platform for a ...