13 search results - page 2 / 3 » Improved simple simulation models for semiconductor wafer fa... |
WSC
2000
13 years 8 months ago
2000
Integrated factory models of semiconductor fabrication facilities allow conclusions to be drawn on the impact of a given Automated Material Handling System (AMHS) and interactions...
WSC
2000
13 years 8 months ago
2000
Simulation models are useful to predict and understand the impact of changes to a manufacturing system. Typical factory simulation models include the parts being manufactured in t...
TASE
2011
IEEE
13 years 1 months ago
2011
IEEE
—For multiclass flow line models, we identify a class of service times that allow a decomposition of the system into subsets of servers called channels. In each channel, the cus...
WSC
2008
13 years 9 months ago
2008
Cluster tools have been one of the proposed alternatives to improve operations performance in semiconductor fabrication. The benefits include high yield throughput, less contamina...
WSC
2004
13 years 8 months ago
2004
In this paper, we consider semiconductor manufacturing processes that can be characterized by a diverse product mix, heterogeneous parallel machines, sequence-dependent setup time...