Resolution enhancement techniques (RET) such as optical proximity correction (OPC) and phase-shift mask (PSM) technology are deployed in modern processes to increase the fidelity ...
Luigi Capodieci, Puneet Gupta, Andrew B. Kahng, De...
Applications such as layered manufacturing, or in general, solid free-form fabrication, pose a major challenge on online process control. For these parts to be functional, it is i...