72 search results - page 2 / 15 » Modeling Tool Failures in Semiconductor Fab Simulation |
WSC
2004
13 years 8 months ago
2004
A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. As wafer sizes have in...
TASE
2011
IEEE
13 years 2 months ago
2011
IEEE
—For multiclass flow line models, we identify a class of service times that allow a decomposition of the system into subsets of servers called channels. In each channel, the cus...
WSC
2008
13 years 9 months ago
2008
Cluster tools play an important role in modern semiconductor fabs. Due to their complexity in configuration and their varying material flow, the creation of accurate throughput mo...
WSC
1998
13 years 8 months ago
1998
In semiconductor fabrication facilities, it can be observed an increase in work in progress (WIP) even weeks after the failure of the bottleneck workcenter. In this paper, we deve...
WSC
2007
13 years 9 months ago
2007
Photolithography is generally regarded as the most constraining element in semiconductor manufacturing. This is primarily attributable to the high capital investment and extensive...