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ASPDAC
2009
ACM
153views Hardware» more  ASPDAC 2009»
13 years 10 months ago
A 3D prototyping chip based on a wafer-level stacking technology
We have developed a new 3-dimensional stacking technology using wafer-to-wafer stacked method and evaluated the connectivity between TSV and micro-bump. The prototype 3-layer stac...
Nobuaki Miyakawa