Sciweavers

CORR
2008
Springer
102views Education» more  CORR 2008»
14 years 17 days ago
A High-Q Microwave MEMS Resonator
Zhu Jian, Yu Yuanwei, Zhang Yong, Chen Chen, J. Sh...
CORR
2008
Springer
66views Education» more  CORR 2008»
14 years 17 days ago
Tuneable Capacitor based on dual picks profile of the sacrificial layer
In this work, we describe a simple 1-mask sacrificial layer process that allows us to prototype a tuneable capacitor. The process is specially optimized to procure a dual picks pr...
Sofiane Soulimane, Fabrice Casset, François...
CORR
2008
Springer
52views Education» more  CORR 2008»
14 years 17 days ago
Out-of-Plane Cmos Compatible Magnetometers
Three-dimensional MEMS magnetometers with use of residual stresses in thin multilayers cantilevers are presented. Half-loop cantilevers based on Lorentz-force deflection convert m...
M. El Ghorba, Nicolas André, S. Sobieski, J...
CORR
2008
Springer
87views Education» more  CORR 2008»
14 years 17 days ago
Identification of Test Structures for Reduced Order Modeling of the Squeeze Film Damping in Mems
In this study the dynamic behaviour of perforated microplates oscillating under the effect of squeeze film damping is analyzed. A numerical approach is adopted to predict the effe...
Aurelio Somà, Giorgio De Pasquale
CORR
2008
Springer
60views Education» more  CORR 2008»
14 years 17 days ago
Enhanced Sensing Characteristics in MEMS-based Formaldehyde Gas Sensor
In this study, the proposed sensor integrates a sensing layer, a heating device, and electrodes on the substrate. The micro heater is integrated in the sensor to provide instantan...
Yu-Hsiang Wang, C.-C. Hsiao, Chia-Yen Lee, Rong-Hu...
CORR
2008
Springer
105views Education» more  CORR 2008»
14 years 17 days ago
2-D Analysis of Enhancement of Analytes Adsorption Due to Flow Stirring by Electrothermal Force in The Microcantilever Sensor
Ac electrokinetic flows are commonly used for manipulating micron-scale particles in a biosensor system. At the solid-liquid state there are two kinds of processes in the reaction...
Ming-Chih Wu, Jeng-Shian Chang, Chih-Kai Yang
CORR
2008
Springer
70views Education» more  CORR 2008»
14 years 17 days ago
Silicon microneedles array with biodegradable tips for transdermal drug delivery
This paper presents the fabrication process, characterization results and basic functionality of silicon microneedles array with biodegradable tips. In order to avoid the main pro...
Bangtao Chen, Jiashen Wei, Francis Eng Hock Tay, Y...
CORR
2008
Springer
79views Education» more  CORR 2008»
14 years 17 days ago
Set-up and characterization of a humidity sensor realized in LTCC-technology
A new type of integrated temperature and humidity sensor applying LTCC-technology (Low Temperature Cofired Ceramics) has been developed and characterized. The proposed device is b...
W. Smetana, M. Unger
CORR
2008
Springer
103views Education» more  CORR 2008»
14 years 17 days ago
Characterisation of an Electrostatic Vibration Harvester
Harvesting energy from ambient vibration is proposed as an alternative to storage based power supplies for autonomous systems. The system presented converts the mechanical energy ...
T. Sterken, Geert Altena, P. Fiorini, R. Puers
CORR
2008
Springer
67views Education» more  CORR 2008»
14 years 17 days ago
Analysis of polysilicon micro beams buckling with temperature-dependent properties
M. Shamshirsaz, M. Bahrami, M. B. Asgari, M. Tayef...