In this work, we describe a simple 1-mask sacrificial layer process that allows us to prototype a tuneable capacitor. The process is specially optimized to procure a dual picks pr...
Three-dimensional MEMS magnetometers with use of residual stresses in thin multilayers cantilevers are presented. Half-loop cantilevers based on Lorentz-force deflection convert m...
In this study the dynamic behaviour of perforated microplates oscillating under the effect of squeeze film damping is analyzed. A numerical approach is adopted to predict the effe...
In this study, the proposed sensor integrates a sensing layer, a heating device, and electrodes on the substrate. The micro heater is integrated in the sensor to provide instantan...
Ac electrokinetic flows are commonly used for manipulating micron-scale particles in a biosensor system. At the solid-liquid state there are two kinds of processes in the reaction...
This paper presents the fabrication process, characterization results and basic functionality of silicon microneedles array with biodegradable tips. In order to avoid the main pro...
Bangtao Chen, Jiashen Wei, Francis Eng Hock Tay, Y...
A new type of integrated temperature and humidity sensor applying LTCC-technology (Low Temperature Cofired Ceramics) has been developed and characterized. The proposed device is b...
Harvesting energy from ambient vibration is proposed as an alternative to storage based power supplies for autonomous systems. The system presented converts the mechanical energy ...