CORR
2008
Springer
13 years 7 months ago
2008
Springer
Packaging costs of Micro-Electro-Mechanical System (MEMS) are still contributing with >50% to the total costs of most devices. Aligned wafer bonding techniques for Wafer-level ...
CORR
2008
Springer
13 years 7 months ago
2008
Springer
In piezoresisitive two-axis accelerometers with two proof masses suspended by cantilever beams, there are generally many ways to configure the Wheatstone bridges. The configuratio...
CORR
2008
Springer
13 years 7 months ago
2008
Springer
In the framework of the SPOT-NOSED European project, nanoscale sensing elements bearing olfactory receptors and grafted onto functionalized gold substrates are used as odorant det...
CORR
2008
Springer
13 years 7 months ago
2008
Springer
Micromechanical devices like accelerometers or rotation sensors form an increasing segment beneath the devices supplying the consumer market. A hybrid integration approach to buil...
CORR
2008
Springer
13 years 7 months ago
2008
Springer
Micro-scanners have been widely used in many optical applications. The micro-scanner presented in this paper uses multimorph-type bending actuators to tilt a square plate mirror. ...
CORR
2008
Springer
13 years 7 months ago
2008
Springer
A cost effectively method to fabricate nanopores in silicon by only using the conventional wet-etching technique is developed in this research. The main concept of the proposed me...
CORR
2008
Springer
13 years 7 months ago
2008
Springer
In this paper, we report the advantage of using AC actuating signal for driving MEMS actuators instead of DC voltages. The study is based upon micro mirror devices used in digital...
CORR
2008
Springer
13 years 7 months ago
2008
Springer
An original packaging method suitable for integrated thermal mass flow sensors is presented. The method consists in the application of a plastic transparent adapter to the chip su...
CORR
2010
Springer
13 years 7 months ago
2010
Springer
In this paper, we propose an efficient client-to-client streaming approach to cooperatively stream the video using chaining technique with unicast communication among the clients....
CORR
2008
Springer
13 years 7 months ago
2008
Springer
Fast identification methods of pressure sensors are investigated. With regard to a complete accurate sensor parameter identification two different measurement methods are combined...