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    ISPD
    1999
    ACM
    88views Hardware» more  ISPD 1999»
    Subwavelength optical lithography: challenges and impact on physical design
    14 years 5 months ago
    Subwavelength optical lithography: challenges and impact on physical design
    Download  vlsicad.ucsd.edu
    We review the implications of subwavelength optical lithography for new tools and ows in the interface between layout design and manufacturability. After discussing the necessity ...
    Andrew B. Kahng, Y. C. Pati
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    DAC
    1999
    ACM
    129views Computer Architecture» more  DAC 1999»
    Subwavelength Lithography and Its Potential Impact on Design and EDA
    15 years 1 months ago
    Subwavelength Lithography and Its Potential Impact on Design and EDA
    Download  vlsicad.ucsd.edu
    This tutorial paper surveys the potential implications of subwavelength optical lithography for new tools and flows in the interface between layout design and manufacturability. W...
    Andrew B. Kahng, Y. C. Pati
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    Read More »
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