ISPD 2007 International Symposium on Physical Design
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Wall of Fame | Most Viewed ISPD-2007 Paper
ISPD
2007
ACM
14 years 29 days ago
2007
ACM
When VLSI technology scales toward 45nm, the lithography wavelength stays at 193nm. This large gap results in strong refractive effects in lithography. Consequently, it is a huge...
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