Sciweavers

ISPD   2007 International Symposium on Physical Design
Wall of Fame | Most Viewed ISPD-2007 Paper
ISPD
2007
ACM
151views Hardware» more  ISPD 2007»
14 years 2 months ago
Pattern sensitive placement for manufacturability
When VLSI technology scales toward 45nm, the lithography wavelength stays at 193nm. This large gap results in strong refractive effects in lithography. Consequently, it is a huge...
Shiyan Hu, Jiang Hu
Disclaimer and Copyright Notice
Sciweavers respects the rights of all copyright holders and in this regard, authors are only allowed to share a link to their preprint paper on their own website. Every contribution is associated with a desciptive image. It is the sole responsibility of the authors to ensure that their posted image is not copyright infringing. This service is compliant with IEEE copyright.
IdReadViewsTitleStatus
1Download preprint from source151
2Download preprint from source128
3Download preprint from source124
4Download preprint from source116
5Download preprint from source111
6Download preprint from source99
7Download preprint from source88
8Download preprint from source86
9Download preprint from source84
10Download preprint from source82
11Download preprint from source76