Hybrid Nanorobotic Approaches for Fabricating NEMS from 3D Helical Nanostructures

- Robotic manipulation at the nanometer scale is a promising technology for structuring, characterizing and assembling nano building blocks into nanoelectromechanical systems (NEMS). Combined with recently developed nanofabrication processes, a hybrid approach to building NEMS from SiGe/Si/Cr nanocoils and Si/Cr nanospirals is presented. Nanosensors and nanoactuators are investigated from experimental, theoretical, and design perspectives.

• Type: Conference
• Year: 2006
• Where: ICRA
• Authors: Lixin Dong, Li Zhang, Dominik J. Bell, Bradley J. Nelson, Detlev Grützmacher
• Keywords: Building Nems, ICRA 2006, Nano Building Blocks, Nanometer Scale, Robotics