Optical MEMS pressure sensor using ring resonator on a circular diaphragm

In this paper we propose and analyse an optical MEMS pressure sensor consisting of a ring resonator located over the edge of a circular silicon diaphragm. As the diaphragm deflects due to the applied pressure, stress induced refractive index change in the waveguide leads to change in phase of the light propagating through resonator. Shift in the resonance frequency due to this phase change gives the measure of the applied pressure. The phase response of the sensor is found to be about 19µrad/Pa for 1mm radius 65µm thick circular diaphragm. The wavelength shift of 0.78pm/kPa is obtained for this sensor and can be used upto a range of 300kPa. Since the wavelength of operation is around

• Type: Conference
• Year: 2005
• Where: ICMENS
• Authors: Prasant Kumar Pattnaik, Bh. Vijayaaditya, T. Srinivas, A. Selvarajan
• Keywords: Applied Pressure, Circular Silicon Diaphragm, Hardware, ICMENS 2005, MEMS Pressure Sensor