3 search results - page 1 / 1 » Optical MEMS pressure sensor using ring resonator on a circu... |
ICMENS
2005
IEEE
14 years 1 months ago
2005
IEEE
In this paper we propose and analyse an optical MEMS pressure sensor consisting of a ring resonator located over the edge of a circular silicon diaphragm. As the diaphragm deflec...
MJ
2006
13 years 7 months ago
2006
The design guidelines for micro diaphragm-type pressure sensors have been established by characterization of the relationships among diaphragm thickness, side length, sensitivity,...
IAJIT
2011
13 years 2 months ago
2011
: In this paper, an analytical and simulation solution for touch mode Micro-electromechanical systems pressure sensor operating in harsh environment is proposed. The principle of t...