An overview of microsystems technology is presented along with a discussion of the recent trends and challenges associated with its development. A typical bottom-up design methodology is described and we propose, in contrast, an efficient and effective top-down methodology. We illustrate its implementation with the development of a microsystem design that has been completed and fabricated in CMOS technology. Gaps in the tool capabilities are identified and suggestions for future directions in CAD tool support for microsystems technology are presented.
Michael S. McCorquodale, Fadi H. Gebara, Keith L.