Infrastructure IP for Back-End Yield Improvement

The objective of this paper is to present an infrastructure IP (I-IP) designed to characterize yield loss in the process back-end. The I-IP structure is described in using a bottom-up approach with emphasis on its scalability. Using this infrastructure IP, the defect density tracking as well as the test and diagnosis of process back-end critical parameters can be quickly and easily performed. To reach this goal, the test flow and its related signature extraction is given. Thus, the use of this I-IP allows to improve the manufacturing process by diagnosing the back-end yield loss.

• Type: Conference
• Year: 2003
• Where: ITC
• Authors: L. Forli, Jean Michel Portal, Didier Née, Bertrand Borot
• Keywords: Hardware, Infrastructure Ip, ITC 2003, Process Back-end, Yield Loss