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    1998
    IEEE
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    Failure modes for stiction in surface-micromachined MEMS

    14 years 3 months ago
    Failure modes for stiction in surface-micromachined MEMS
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    Abhijeet Kolpekwar, Ronald D. Blanton, David Woodi
    claim paper
    Added 05 Aug 2010
    Updated 05 Aug 2010
    Type Conference
    Year 1998
    Where ITC
    Authors Abhijeet Kolpekwar, Ronald D. Blanton, David Woodilla
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