A stochastic integral equation method for modeling the rough surface effect on interconnect capacitance

In this paper we describe a stochastic integral equation method for computing the mean value and the variance of capacitance of interconnects with random surface roughness. An ensemble average Green’s function is combined with a matrix Neumann expansion to compute nominal capacitance and its variance. This method avoids the time-consuming Monte Carlo simulations and the discretization of rough surfaces. Numerical experiments show that the results of the new method agree very well with Monte Carlo simulation results.

• Type: Conference
• Year: 2004
• Where: ICCAD
• Authors: Zhenhai Zhu, Jacob White, Alper Demir
• Keywords: Hardware, ICCAD 2004, Integral Equation Method, Monte Carlo Simulation, Time-consuming Monte Carlo