— As semiconductor processing techniques continue to scale down, transient faults, also known as soft errors, are increasingly becoming a reliability threat to high-performance microprocessors fabricated using state-of-the-art CMOS technologies. Emerging 3D chip integration techniques leverage vertically stacked structures to reduce on-chip wire delay and have shown the capability of overcoming interconnect bottlenecks as well as reducing power consumption. While the benefits of 3D die stacking on microprocessor performance and power have been extensively investigated recently, its implication on transient fault susceptibility is largely unknown. In this work, we make the first attempt to characterize microarchitecture soft error vulnerabilities across the stacked chip layers under 3D integration technologies. Using models and simulations that capture soft error physical mechanism and circuit/architecture level impact, our study reveals the opportunities of leveraging 3D integration ...