Design, Development and Experiments of a High Stroke-precision 2DoF (Linear-angular) Microsystem

— This paper presents the design, the development and the experiments on a two degrees of freedom (2DoF) microsystem. The originality of the microsystem is its ability to do angular and linear motions independently with a very high stroke and a submicrometric precision. The target performances are first presented. Afterwards the stick-slip piezoelectric microactuators that are used are presented. Then, their integration inside the microsystem is detailed. Finally, results of experiments are given. Keywords : Micromanipulation system, angular and linear motions, piezoelectric actuator, design and development, stick-slip.

• Type: Conference
• Year: 2006
• Where: ICRA
• Authors: Micky Rakotondrabe, Yassine Haddab, Philippe Lutz
• Keywords: ICRA 2006, Linear Motions, Microsystem, Robotics, Stick-slip Piezoelectric Microactuators