Modeling Tool Failures in Semiconductor Fab Simulation

In this research, we investigate how well Weibull, Gamma, and special bimodal distribution are suited as an alternative to the exponential distribution approach in the stochastic modeling of machine downtimes and times between failures. We also discuss the question whether sampling shop-floor data should not only include first order statistics, but also measures that allow to monitor and model the variability of the equipment and processes and even the correct distribution of the data.

• Type: Conference
• Year: 2004
• Where: WSC
• Authors: Oliver Rose
• Keywords: Exponential Distribution Approach, Modeling And Simulation, Special Bimodal Distribution, Stochastic Modeling, WSC 2004