—Variations of process parameters have an important impact on reliability and yield in deep sub micron IC technologies. One methodology to estimate the influence of these effects...
Shallow trench isolation (STI) is the mainstream CMOS isolation technology. It uses chemical mechanical planarization (CMP) to remove excess of deposited oxide and attain a planar...
Andrew B. Kahng, Puneet Sharma, Alexander Zelikovs...
While performance specifications are verified before sign-off for a modern nanometer scale design, extensive application of optical proximity correction substantially alters the l...
Puneet Gupta, Andrew B. Kahng, Youngmin Kim, Denni...
— In the face of increased process variations, at-speed manufacturing test is necessary to detect subtle delay defects. This procedure necessarily tests chips at a slightly highe...
Jinjun Xiong, Vladimir Zolotov, Chandu Visweswaria...
—Time-dependent performance degradation due to transistor aging caused by mechanisms such as Negative Bias Temperature Instability (NBTI) and Hot Carrier Injection (HCI) is one o...