Many of the tools and techniques used to evaluate and characterize ICs can be applied to MEMS technology. In this paper we discuss various tools and techniques used to provide str...
The expending development of wireless communication requires strong demands for components with improved capabilities. RF MEMS devices offer a variable alternative to conventional...
MEMS-based storage is a new, non-volatile storage technology currently under development. It promises fast data access, high throughput, high storage density, small physical size,...
Bo Hong, Thomas J. E. Schwarz, Scott A. Brandt, Da...
Electrical testing of MicroElectroMechanical Systems (MEMS) can take on many different forms including wafer probing, electrical trimming, final test at temperatures, engineering ...
Theresa Maudie, Alex Hardt, Rick Nielsen, Dennis S...
Packaging costs of Micro-Electro-Mechanical System (MEMS) are still contributing with >50% to the total costs of most devices. Aligned wafer bonding techniques for Wafer-level ...
Herwig Kirchberger, Paul Lindler, Markus Wimplinge...