In this paper we propose and analyse an optical MEMS pressure sensor consisting of a ring resonator located over the edge of a circular silicon diaphragm. As the diaphragm deflec...
Prasant Kumar Pattnaik, Bh. Vijayaaditya, T. Srini...
The design guidelines for micro diaphragm-type pressure sensors have been established by characterization of the relationships among diaphragm thickness, side length, sensitivity,...
Xiaodong Wang, Baoqing Li, Onofrio L. Russo, Harry...
: In this paper, an analytical and simulation solution for touch mode Micro-electromechanical systems pressure sensor operating in harsh environment is proposed. The principle of t...
Yadollah Hezarjaribi, Mohd Hamidon, Roslina Mohd S...