— Modeling and scheduling of cluster tools are critical to improving the productivity and to enhancing the design of wafer processing flows and equipment for semiconductor manuf...
Jingang Yi, Shengwei Ding, Dezhen Song, Mike Tao Z...
Abstract--Cluster tools are widely used as semiconductor manufacturing equipment. While throughput analysis and scheduling of single-cluster tools have been well-studied, research ...
Jingang Yi, Shengwei Ding, Dezhen Song, Mike Tao Z...
Cluster tools, which combine several single-wafer processing modules with wafer handling robots in a closed environment, have been increasingly used for most wafer fabrication pro...
We present procedures and tools for the analysis of network traffic measurements. The tools consist of stand-alone 1 modules that implement advanced statistical analysis procedure...
Abstract. Synthesis of digital signal processing (DSP) software from dataflow-based formal models is an effective approach for tackling the complexity of modern DSP applications. I...
Ming-Yung Ko, Praveen K. Murthy, Shuvra S. Bhattac...