Due to scaling laws, in microfluidic, flows are laminar. Consequently, mixing between two liquids is mainly obtained by natural diffusion which may take a long time or equivalentl...
This paper reports on the systematic electromechanical characterization of a new three-axial force sensor used in dimensional metrology of micro components. The silicon based sens...
Stefan Spinner, J. Bartholomeyczik, Bernd Becker, ...
This paper deals with a single-crystal-silicon (SCS) MEMS resonator with improved temperature stability. While simulations have shown that the temperature coefficient of resonant ...
A. Giridhar, F. Verjus, F. Marty, A. Bosseboeuf, T...
This paper considers a developing theory on the effects of inevitable process variations during the fabrication of MEMS and other microsystems. The effects on the performance and ...
Shyam Praveen Vudathu, Kishore K. Duganapalli, Rai...
This paper presents a simple and effective method to fabricate a polydimethyl-siloxane (PDMS) microlens array with a high fill factor, which utilizes the UV proximity printing and...
Advances in material processing such as silicon micromachining are opening the way to vacuum microelectronics. Two-dimensional vacuum components can be fabricated using the micros...
A. Phommahaxay, G. Lissorgues, L. Rousseau, T. Bou...
In RF-MEMS packaging, next to the protection of movable structures, optimization of package electrical performance plays a very important role. In this work, a wafer-level packagi...
Jacopo Iannacci, Jason Tian, Saoer Sinaga, Roberto...