The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices i...
V. Rochus, J.-C. Golinval, C. Louis, C. Mendez, I....
An array of micromirrors for beam steering optical switching has been designed in a thick polysilicon technology. A novel semi-analytical method to calculate the static characteri...
This paper presents a simple method to fabricate micro-ball lens and its array. The key technology is to use the hydrophobic characteristics of polyterafluoroethylene (PTFE) subst...
In Magnetic Resonance Imaging (MRI), to achieve sufficient Signal to Noise Ratio (SNR), the electrical performance of the RF coil is critical. We developed a device (microcoil) ba...
Marion Woytasik, J.-C. Ginefri, J.-S. Raynaud, M. ...
This paper presents a new research study on the platform fabrication of fluorescence bio-detection chip with an optical fiber transmission. Anisotropic wet etching on (100) silico...
As an alternative to the time-consuming solder pre-forms and pastes currently used, a co-electroplating method of eutectic Au-Sn alloy was used in this study. Using a coelectropla...
A novel valveless micro impedance pump is proposed and analyzed in this study. The pump is constructed of a upper glass plate, two glass tubes, a PDMS (polydimethylsilxane) diaphr...