CORR
2007
Springer
13 years 7 months ago
2007
Springer
Due to scaling laws, in microfluidic, flows are laminar. Consequently, mixing between two liquids is mainly obtained by natural diffusion which may take a long time or equivalentl...
CORR
2007
Springer
13 years 7 months ago
2007
Springer
This paper reports on the systematic electromechanical characterization of a new three-axial force sensor used in dimensional metrology of micro components. The silicon based sens...
CORR
2007
Springer
13 years 7 months ago
2007
Springer
This paper deals with a single-crystal-silicon (SCS) MEMS resonator with improved temperature stability. While simulations have shown that the temperature coefficient of resonant ...
CORR
2007
Springer
13 years 7 months ago
2007
Springer
This paper considers a developing theory on the effects of inevitable process variations during the fabrication of MEMS and other microsystems. The effects on the performance and ...
CORR
2007
Springer
13 years 7 months ago
2007
Springer
CORR
2007
Springer
13 years 7 months ago
2007
Springer
This paper presents a simple and effective method to fabricate a polydimethyl-siloxane (PDMS) microlens array with a high fill factor, which utilizes the UV proximity printing and...
CORR
2007
Springer
13 years 7 months ago
2007
Springer
CORR
2007
Springer
13 years 7 months ago
2007
Springer
Advances in material processing such as silicon micromachining are opening the way to vacuum microelectronics. Two-dimensional vacuum components can be fabricated using the micros...
CORR
2007
Springer
13 years 7 months ago
2007
Springer
In RF-MEMS packaging, next to the protection of movable structures, optimization of package electrical performance plays a very important role. In this work, a wafer-level packagi...
CORR
2007
Springer
13 years 7 months ago
2007
Springer
Computer model of a ”sense of humour” suggested previously [1 – 3] is raised to the level of a realistic algorithm.