In order to efficiently design complex microelectromechanical systems (MEMS) having large numbers of multi-domain components, a hierarchically structured design approach that is ...
This paper deals with a single-crystal-silicon (SCS) MEMS resonator with improved temperature stability. While simulations have shown that the temperature coefficient of resonant ...
A. Giridhar, F. Verjus, F. Marty, A. Bosseboeuf, T...
We combine interactive evolutionary computation (IEC) with existing evolutionary synthesis software for the design of micromachined resonators and evaluate its effectiveness using...
Raffi R. Kamalian, Hideyuki Takagi, Alice M. Agogi...
This paper presents a new vibration-based electromagnetic micro power generator fabricated using microelectromechanical systems (MEMS) technology, which can convert ambient vibrat...