This tutorial paper surveys the potential implications of subwavelength optical lithography for new tools and flows in the interface between layout design and manufacturability. W...
For emerging deep-subwavelength lithography technologies (90 nm and following) the data volume and the complexity of Optical Proximity Correction (OPC) have increased dramatically...
We review the implications of subwavelength optical lithography for new tools and ows in the interface between layout design and manufacturability. After discussing the necessity ...
This paper proposes a general and systematic code design method to efficiently combine constrained codes with parity-check (PC) codes for optical recording. The proposed constraine...
Abstract— In this paper, we analyze and compare five imagebased visual servoing control laws. Three of them are classical while two new ones are proposed. The first new control...