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» Dummy fill optimization for enhanced manufacturability
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ISPD
2010
ACM
185views Hardware» more  ISPD 2010»
14 years 2 months ago
Dummy fill optimization for enhanced manufacturability
Yaoguang Wei, Sachin S. Sapatnekar
ASPDAC
2007
ACM
123views Hardware» more  ASPDAC 2007»
13 years 11 months ago
Coupling-aware Dummy Metal Insertion for Lithography
As integrated circuits manufacturing technology is advancing into 65nm and 45nm nodes, extensive resolution enhancement techniques (RETs) are needed to correctly manufacture a chip...
Liang Deng, Martin D. F. Wong, Kai-Yuan Chao, Hua ...
DAC
2008
ACM
14 years 8 months ago
ELIAD: efficient lithography aware detailed router with compact post-OPC printability prediction
In this paper, we present ELIAD, an efficient lithography aware detailed router to optimize silicon image after optical proximity correction (OPC) in a correct-by-construction man...
Minsik Cho, Kun Yuan, Yongchan Ban, David Z. Pan