604 search results - page 4 / 121 » Failure Mechanisms in MEMS |
CORR
2008
Springer
13 years 7 months ago
2008
Springer
The very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performances radio frequencies (RF) components. Micro...
ISCAS
2006
IEEE
2006
IEEE
Microelectromechanical systems in 3D SOI-CMOS: sensing electronics embedded in mechanical structures
14 years 1 months ago
— We discuss the design of CMOS MEMS in a 3D SOI-CMOS technology. We present layout architectures, preliminary mechanics modeling using finite element analysis and release proce...
ICMENS
2005
IEEE
14 years 19 days ago
2005
IEEE
The influence of thermal effects on the reliability of RF MEMS switches is investigated in this paper. Low power consumption and capacity to handle high power at very high frequen...
CORR
2008
Springer
13 years 6 months ago
2008
Springer
Properties of typical MEMS materials have been widely investigated. Mechanical properties of MEMS structures depend not only on the bulk material properties, but also structural fa...
DAC
1997
ACM
13 years 11 months ago
1997
ACM
In order to efficiently design complex microelectromechanical systems (MEMS) having large numbers of multi-domain components, a hierarchically structured design approach that is ...