In order to efficiently design complex microelectromechanical systems (MEMS) having large numbers of multi-domain components, a hierarchically structured design approach that is ...
— We discuss the design of CMOS MEMS in a 3D SOI-CMOS technology. We present layout architectures, preliminary mechanics modeling using finite element analysis and release proce...
An automated design synthesis system based on a multi-objective genetic algorithm (MOGA) has been developed for the optimization of surface-micromachined MEMS devices. A hierarchi...
Ying Zhang, Raffi R. Kamalian, Alice M. Agogino, C...
The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices i...
V. Rochus, J.-C. Golinval, C. Louis, C. Mendez, I....
This summary of selected microelectromechanical systems (MEMS) processes guides the reader through a wide variety of fabrication techniques used to make micromechanical structures...