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CORR
2008
Springer
148views Education» more  CORR 2008»
13 years 10 months ago
Copper Electrodeposition for 3D Integration
Abstract-Two dimensional (2D) integration has been the traditional approach for IC integration. Increasing demands for providing electronic devices with superior performance and fu...
Rozalia Beica, Charles Sharbono, Tom Ritzdorf
CORR
2008
Springer
87views Education» more  CORR 2008»
13 years 10 months ago
High Q-factor CMOS-MEMS inductor
This study investigates a high Q-factor spiral inductor fabricated by the CMOS (complementary metal oxide semiconductor) process and a post-process. The spiral inductor is manufact...
Ching-Liang Dai, Jin-Yu Hong, Mao-Chen Liu
CORR
2008
Springer
86views Education» more  CORR 2008»
13 years 10 months ago
A Microcantilever-based Gas Flow Sensor for Flow Rate and Direction Detection
The purpose of this paper is to apply characteristics of residual stress that causes cantilever beams to bend for manufacturing a micro-structured gas flow sensor. This study uses ...
Yu-Hsiang Wang, Tzu-Han Hsueh, Rong-Hua Ma, Chia-Y...
CORR
2008
Springer
109views Education» more  CORR 2008»
13 years 10 months ago
Simulation of Coating -Visco-Elastic liquid in the Mico-Nip of Metering Size Press
for a set of operating conditions and coating color formulations, undesirable phenomena like color spitting and coating ribs may be triggered in the Micro-nip during the coating pr...
Haifa El-Sadi, Nabil Esmail
CORR
2008
Springer
91views Education» more  CORR 2008»
13 years 10 months ago
High Density out-of-Plane Microprobe Array
In this paper, the high density out-of-plane microprobe array is demonstrated. The fabrication processes of proposed device including bulk micromachining, thin film deposition and ...
C. H. Huang, Chingfu Tsou, Tenghsien Lai
CORR
2008
Springer
55views Education» more  CORR 2008»
13 years 10 months ago
A Nanostructual Microwave Probe Used for Atomic Force Microscope
Yang Ju, M. Hamada, Tetsuya Kobayashi, Hitoshi Soy...
CORR
2008
Springer
60views Education» more  CORR 2008»
13 years 10 months ago
Model Based Sensor System for Temperature Measurement in R744 Air Conditioning Systems
- The goal is the development of a novel principle for the temperature acquisition of refrigerants in CO2 air conditioning systems. The new approach is based on measuring the tempe...
Sven Reitz, Andreas Schroth, Peter Schneider
CORR
2008
Springer
72views Education» more  CORR 2008»
13 years 10 months ago
Design Optimization for an Electro-Thermally Actuated Polymeric Microgripper
Thermal micro-actuators are a promising solution to the need for large-displacement, gentle handling force, low-power MEMS actuators. Potential applications of these devices are mi...
R. Voicu, R. Muller, L. Eftime
CORR
2008
Springer
46views Education» more  CORR 2008»
13 years 10 months ago
Micro-electroforming metallic bipolar electrodes for mini-DMFC stacks
This paper describes the development of metallic bipolar plate fabrication using micro-electroforming process for mini-DMFC (direct methanol fuel cell) stacks. Ultraviolet (UV) lit...
Ruey-Fang Shyu, Hsiharng Yang, J.-H. Lee
CORR
2008
Springer
103views Education» more  CORR 2008»
13 years 10 months ago
Single Chip Sensing of Multiple Gas Flows
The fabrication and experimental characterization of a thermal flow meter, capable of detecting and measuring two independent gas flows with a single chip, is described. The device...
P. Bruschi, M. Dei, M. Piotto