A Statistical Approach to Characterizing and Testing Functionalized Nanowires

Unlike the top-down photolithographic CMOS VLSI process, cost-effective bulk fabrication of nanodevices calls for a bottom-up approach, generally called self-assembly. Selfassembly, however, inherently lends itself to innate disparities in the structure of nominally identical nanodevices and, consequently, wide inter-device variance in their functionality. As a result, nanodevice characterization and testing calls for a slow and tedious procedure involving a large number of measurements. In this work, we discuss a statistical approach which learns measurement correlations from a small set of fully characterized nanodevices and utilizes the extracted knowledge to simplify the process for the rest of the nanodevices. More specifically, we employ various machine-learning methods which rely on a small subset of measurements to i) predict the performances of a fabricated nanodevice, ii) decide whether a nanodevice passes or fails a given set of specifications, and iii) bin a nanodevice w...

• Type: Conference
• Year: 2008
• Where: VTS
• Authors: James Dardig, Haralampos-G. D. Stratigopoulos, Eric Stern, Mark Reed, Yiorgos Makris
• Keywords: Cost-effective Bulk Fabrication, Identical Nanodevices, Top-down Photolithographic Cmos, VLSI, VTS 2008