Cluster tools play an important role in modern semiconductor fabs. Due to their complexity in configuration and their varying material flow, the creation of accurate throughput mo...
Jan Lange, Kilian Schmidt, Roy Borner, Oliver Rose
Systems with many integrated circuits (ICs), often of the same type, are increasingly common to meet the constant performance demand. However, systems in recent semiconductor techn...
Mudassar Majeed, Daniel Ahlstrom, Urban Ingelsson,...
IDDQ test is a valuable test method for semiconductor manufacturers. However, its effectiveness is reduced for deep sub-micron technology chips due to rising background leakage. C...
Present and future semiconductor technologies are characterized by increasing parameters variations as well as an increasing susceptibility to external disturbances. Transient err...
The proposed implementation is a monitor system able to train operators for on-line real time manufacturing control in order to analyze the performance of a production process. Th...
Agostino G. Bruzzone, Pietro Giribone, Roberto Rev...